Publications

Found 1 results
Author Title Type [ Year(Asc)]
Filters: Keyword is SOI wafer  [Clear All Filters]
2013
Tseng, V.F.-G., J. Li, X. Zhang, and H. Xie, "Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 67-68, Aug, 2013.