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Electrothermal
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2012
Liu, L.
, and
H. Xie
,
"
Three-dimensional confocal scanning microscope using an MEMS mirror for lateral scan and an MEMS lens scanner for depth scan
"
,
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
, pp. 158-159, Aug, 2012.