A MEMS-based Fast-response Five-hole Probe with Optical Pressure Transducers

The goal of this research is to develop a MEMS-based Five-hole Probe(5HP) that is able to measure the localized velocity vector (both the velocity magnitude and direction) and the static and dynamic pressure, in steady and/or unsteady flow fields. Five optical pressure sensors located on the hemisphere tip of the 5HP provide all information that is needed to resolve the flow. This 5HP is expected to be able to provide high spatial resolution, high frequency response and is compatible with elevated temperature environments. A primary focus of this research is on the microfabrication and micromachining of a die that incorporates five optical transducers and its successive packaging process. The completed sensors will be tested in flow cells and wind tunnels at UF for the final calibration.

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Start date: 
Thursday, January 1, 2015
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