Measurement Technologies

A Flat-Packaged Optical Shear Stress Sensor Using Moiré Transduction for Harsh Environments

As the field of hypersonic vehicle design develops, having shear stress data can aid in the minimization of 
drag source effects and verify results from computational fluid dynamics simulations. Transducer size, 
placement, and narrow bandwidth currently limit accurate shear stress measurements due to the small 
length and time scales seen in turbulent fluid motion and the issue of flow disruption. Shock wave and 
boundary layer effects also produce large thermal loads in hypersonic flows. The proposed research plan 

A High-Bandwidth Heat Flux Sensor for Measurements in Hypersonic Flows

Understanding the character and dynamics of hypersonic boundary layers poses a considerable challenge to the design of hypersonic vehicles.  Specifically, being able to predict the location of laminar-to-turbulent transition is of critical concern as it affects heating rates, aerodynamic loading, and skin-friction drag, therefore impacting the design of the thermal protection system and thus the overall weight and performance of the vehicle.

High Temperature Optical Sapphire Pressure Sensors for Harsh Environments

The primary objective of this research is to develop a high-bandwidth pressure sensor to provide benchmark, time-resolved, dynamic pressure data in high-temperature combustion environments. Specifically, these sensors will be designed to be embedded within a system and provide remote interrogation which will enable pressure to be measured in situ and on line under extreme conditions. Ultimately, this sensing technology will lead to better understanding and increased efficiency of complex power generation systems. In order to achieve this objective, research in sapphire laser micromachining and thermocompression bonding via spark plasma sintering technology will be conducted to enable fabrication of a fiber optic lever pressure sensor that uses a sapphire optical fiber for transduction of the pressure-induced diaphragm deflection. The proposed project will result in instrumentation-grade, high-temperature sensors that enable flush mounted measurements without sensor cooling. Furthermore, the use of optical techniques enables “passive” device operation, with electronics located remotely from the sensor. After fabrication and packaging, the pressure sensor will be rigorously characterized in acoustic plane wave tubes under both ambient and high-temperature conditions to determine its performance as a quantitative measurement device.

A Flush-Mount Piezoelectric MEMS Microphone for Aeroacoustic Flight Testing Applications

In their effort to locate, understand and mitigate the impact of noise sources on an aircraft, aeroacousticiansare in need of a high performance, low cost microphone to combat the increasing noise restrictions on commercial aircraft. Existing commercial sensors, even with their relatively high cost, in some cases constrain the quality and type of measurement that may be achieved. One such constraint is that the physical size and characteristics of the sensors limit the optimal locations in which the sensors may be placed. Previous generations of MEMS aeroacoustic microphones have failed to address the need for a sensor that can be packaged and installed with a smooth front surface to be used for boundary layer measurements in a fuselage array at cruise conditions. Additionally, these microphones must meet demanding requirements, including the sensing of high sound pressure levels (>160 dB) with low distortion (<3%) and high sensitivity stability (with respect to moisture and freezing) over temperatures from -60°F to 150°F. This work addresses the limitations of existing MEMS piezoelectric microphones used in aeroacoustic applications by incorporating through-silicon vias(TSVs) into the fabrication to eliminate the use of wirebondsthat affect the flow field and create an overall flush-mount microphone package.

A MEMS-based Fast-response Five-hole Probe with Optical Pressure Transducers

The goal of this research is to develop a MEMS-based Five-hole Probe(5HP) that is able to measure the localized velocity vector (both the velocity magnitude and direction) and the static and dynamic pressure, in steady and/or unsteady flow fields. Five optical pressure sensors located on the hemisphere tip of the 5HP provide all information that is needed to resolve the flow. This 5HP is expected to be able to provide high spatial resolution, high frequency response and is compatible with elevated temperature environments. A primary focus of this research is on the microfabrication and micromachining of a die that incorporates five optical transducers and its successive packaging process. The completed sensors will be tested in flow cells and wind tunnels at UF for the final calibration.

Ultrashort Pulsed Laser Micromachining of Sapphire Sensors for High Temperature Environments

 

As engineers seek to design more efficient gas turbines, they require a detailed understanding of fundamental thermal-fluid phenomena, as well as active control methods, in high-temperature environments. The high-temperature requirement is based on the increasing turbine inlet temperatures, which have risen to 1500 C, in combined cycle systems in order to improve turbine peak power and efficiency. The limited survivability of silicon-based MEMS sensors in high-temperature and harsh environments has caused researchers to investigate other materials for high-temperature MEMS-based sensors; more specifically sapphire.

 

Sapphire’s material properties make its entry into the world of high temperature sensors promising, but it also renders most traditional MEMS manufacturing methods impractical. Sapphire’s chemical inertness does not allow for effective dry or wet etching; consequently, a more effective method of machining the material is necessary. One potential solution is to use laser ablation, or material removal by vaporization due to localized heat input, to pattern the material. Femtosecond and picosecond pulsed lasers have shown the ability to reduce or eliminate the thermal damage issues of longer pulsed lasers. These lasers are classified as ultrashort pulse width because the duration of the pulse is so short that it does not allow for thermal conduction into the crystal lattice of the material.

Wireless Shear Stress Sensor Array

 


Research Objectives

To develop a wireless shear-stress sensor array to provide three-dimensional, time-resolved, fluctuating skin friction data to aid turbulence model development.

Approach

Each sensor is effectively an LC tank made up of a variable-capacitance floating element and an integrated inductor. The sensing antenna is inductively coupled to the tank and can detect a change in the resonant frequency caused by a displacement of the floating element. An array is realized by designing each sensor to have it’s own unique resonant frequency. Then a single broad spectrum antenna can monitor the entire array.

Broader Impact

The realization of such an array will enable fundamental scientific studies of complex turbulent flows. It could also be implemented into a feedback control system for future air vehicles employing active flow control.

Capacitive Shear Stress Sensors

This project focuses on the development of a non-intrusive, direct, time-resolved wall shear stress sensor system for low-speed applications. The goals of the project include the fabrication and packaging of a 2-D wall-shear stress sensor with backside wire bond contacts to ensure hydraulic smoothness in flow environments. A differential capacitance transduction scheme is utilized with interdigitated comb fingers on each side of a suspended floating element, allowing for measurements to be made in both the positive and negative x- and y-directions.  A synchronous modulation-demodulation circuit is employed to simultaneously capture both mean and fluctuating shear content. Both AC and DC calibrations are performed to determine sensor sensitivity in both directions of transduction. This is the most successful effort of shear sensor development in published literature.