Publications
Found 5 results
Author Title Type [ Year
Filters: Author is Hongwei Qu and First Letter Of Title is M [Clear All Filters]
"Multi-axis integrated CMOS-MEMS inertial sensors", 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT)2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Shanghai, China, IEEE, pp. 1394 - 1395, 2010.
, "A Monolithic CMOS-MEMS 3-Axis Accelerometer With a Low-Noise, Low-Power Dual-Chopper Amplifier", IEEE Sensors Journal, vol. 8, issue 9, pp. 1511 - 1518, 09/2008.
, "A Monolithic CMOS-MEMS 3-Axis Accelerometer with A Low-Noise, Low-Power Dual Chopper Amplifier", Solid-state Sensors, Actuators and Microsystem Workshop, Hilton Head, SC, pp. 224-227, June, 2006.
, "A Multi-Degree-of-Freedom Micromirror Utilizing Inverted-Series-Connected Bimorph Actuators", Journal of Optics A: Pure and Applied Optics, vol. 8, pp. s352-s359, 06/2006.
, Microfabrication and Characterization of an Integrated 3-Axis CMOS-MEMS Accelerometer: IEEE, pp. 60 - 67, 2005.
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