Publications

Xie, H., Z. Pan, W. Frey, and G. K. Fedder, "Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer", Proc. of the 2003 Nanotechnology Conference, San Francisco, CA, USA, 2003.

Xie, H., G. K. Fedder, Z. Pan, and W. Frey, "Phase and Vibration Analysis for a CMOS-MEMS Gyroscope", Proc. of the International Conference on Micro and Nano Systems, Kunming, China, 2002.