MEMS-based Optical Sensors for High Temperature Applications

The goal of this research is to develop a pressure sensor and shear stress sensor that are able to provide continuous, time-resolved flow measurements within high temperature environments such as those seen in hypersonic wind tunnels and turbines.  A primary focus of this research is on the micromachining of sapphire using a picosecond laser.  Sapphire’s mechanical and thermal properties make it an ideal material for high temperature measurements.  Each sensor operates by mechanically deflecting under either a pressure or shear stress.  These deflections can then be detected using an opto-mechanical transduction scheme.  The completed sensors will be tested in flow cells and wind tunnels at UF as well as in other transonic and hypersonic facilities.

J-355PS Picosecond Laser Micromachining Workstation from Oxford Lasers

Laser micromachined sapphire h-bar sensor structure

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