Jingjing Sun will defend her dissertation proposal entitled "MEMS Based Optical Coherence Tomography Imaging." All are welcome to attend.
Hongzhi Sun will be proposing his dissertation topic, "Sensing and Control
Electronics Design for Capacitive CMOS-MEMS Inertial Sensors" at 10am on Tuesday, December 14th in NEB 589. All are invited and refreshments will be provided.
Speaker: Wenjing Liu
Introduction: This talk is about the design, fabrication and characterization of a piezoelectrically actuated high-fill-factor tip-tilt-piston (TTP) micromirror with nearly zero initial tilt and no lateral shift during scanning. The piezoelectric material is a sol-gel lead zirconate titanate (PZT) thin film with a Zr/Ti ratio of 53/47. The zero-initial-tilt (ZIT) and lateral-shift-free (LSF) of the mirror plate is achieved by a folded, three-segment piezoelectric unimorph actuator design. The piezoelectric unimorph actuation beams consist of Pt/Ti/PZT/Pt/Ti/SiO2 multilayers, which are released via undercutting the substrate silicon.
Refreshments will be served.
Speaker: Hongzhi Sun
Introduction: IMUs have wide automotive, consumer electronics, and medical applications. The focus of this talk is on a three-axis accelerometer and two single-axis gyroscopes. The presentation will include the CMOS-MEMS process, the interface circuit design, and the characterizations for the monolithic IMU.
Refreshments will be served.