Publications
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Author [ Title] Type Year Filters: First Letter Of Title is S and Author is Forgey, Christian [Clear All Filters]
"A Segmented‐Target Sputtering Process for Growth of Sub‐50 nm Ferroelectric Scandium–Aluminum–Nitride Films with Composition and Stress Tuning", physica status solidi (RRL) – Rapid Research Letters, vol. 15, issue 5, pp. 2100087, Jan-05-2021.
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