| Title | A Segmented‐Target Sputtering Process for Growth of Sub‐50 nm Ferroelectric Scandium–Aluminum–Nitride Films with Composition and Stress Tuning |
| Publication Type | Journal Article |
| Year of Publication | 2021 |
| Authors | Rassay, S., F. Hakim, C. Li, C. Forgey, N. Choudhary, and R. Tabrizian |
| Journal | physica status solidi (RRL) – Rapid Research Letters |
| Volume | 15 |
| Issue | 5 |
| Pagination | 2100087 |
| Date Published | Jan-05-2021 |
| ISSN | 1862-6254 |
| DOI | 10.1002/pssr.v15.510.1002/pssr.202100087 |
| Short Title | Physica Rapid Research Ltrs |
