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D
Tseng, V.F.-G.
,
J. Li
,
X. Zhang
, and
H. Xie
,
"
Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control
"
,
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
, pp. 67-68, Aug, 2013.