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D
Kadirvel, K.
,
R. Taylor
,
S. Horowitz
,
W. Hunt
,
M. Sheplak
, and
T. Nishida
,
"
Design and Characterization of a MEMS Optical Microphone
"
,
42nd Aerospace Sciences Meeting and Exhibit, AIAA Paper 2004-1030
, Reno, NV, January, 2004.