Title | Design and Characterization of a MEMS Optical Microphone |
Publication Type | Conference Paper |
Year of Publication | 2004 |
Authors | Kadirvel, K., R. Taylor, S. Horowitz, W. Hunt, M. Sheplak, and T. Nishida |
Conference Name | 42nd Aerospace Sciences Meeting and Exhibit, AIAA Paper 2004-1030 |
Date Published | January |
Conference Location | Reno, NV |