Publications
Found 3 results
Author Title Type [ Year
Filters: Author is Zhang, Xiaoyang and First Letter Of Title is F [Clear All Filters]
"A fiber scanner based on a robust Cu/W bimorph electrothermal MEMS stage", MOEMS and Miniaturized Systems XVIIIMOEMS and Miniaturized Systems XVIII, San Francisco, United States, SPIE, 2019.
, "Fourier transform infrared spectrometer based on an electrothermal MEMS mirror", Applied Optics, vol. 57, issue 21, pp. 5956, Jan-01-2018.
, "A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph", Micromachines, vol. 6, issue 12, pp. 1876 - 1889, 12/2015.
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