Publications
Found 2 results
Author Title Type [ Year
] Filters: Author is Victor Tseng and First Letter Of Title is I [Clear All Filters]
, "Inductive eddy current sensing as a displacement sensing mechanism for large piston/rotation micromirrors", TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, IEEE, pp. 176 - 179, 6/2015.
, "Increased Multilayer Fabrication and RF Characterization of a High-Density Stacked MIM Capacitor Based on Selective Etching", IEEE Transactions on Electron Devices, vol. 61, issue 7, pp. 2302 - 2308, 7/2014.