Inductive eddy current sensing as a displacement sensing mechanism for large piston/rotation micromirrors

TitleInductive eddy current sensing as a displacement sensing mechanism for large piston/rotation micromirrors
Publication TypeConference Paper
Year of Publication2015
AuthorsTseng, V. Farm- Guoo, L. Wu, and H. Xie
Conference NameTRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Date Published6/2015
PublisherIEEE
Conference LocationAnchorage, AK, USA
DOI10.1109/TRANSDUCERS.2015.7180890
Refereed DesignationRefereed