| Title | Inductive eddy current sensing as a displacement sensing mechanism for large piston/rotation micromirrors |
| Publication Type | Conference Paper |
| Year of Publication | 2015 |
| Authors | Tseng, V. Farm- Guoo, L. Wu, and H. Xie |
| Conference Name | TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) |
| Date Published | 6/2015 |
| Publisher | IEEE |
| Conference Location | Anchorage, AK, USA |
| DOI | 10.1109/TRANSDUCERS.2015.7180890 |
| Refereed Designation | Refereed |
