Publications

Found 2 results
Author Title Type [ Year(Desc)]
Filters: Author is Yan, Gui Zhen and First Letter Of Title is M  [Clear All Filters]
2010
Sun, H., K. Jia, Y. Ding, Z. Yang Guo, X. Liu, G. Zhen Yan, and H. Xie, "A monolithic inertial measurement unit fabricated with improved DRIE post-CMOS process", 2010 Ninth IEEE Sensors Conference (SENSORS 2010)2010 IEEE Sensors, Kona, HI, IEEE, pp. 1198 - 1202, 2010.
Sun, H., K. Jia, Z. Yang Guo, X. S. Liu, G. Zhen Yan, and H. Xie, A Monolithic Inertial Measurement Unit Fabricated with Improved DRIE Post-CMOS Process: IEEE, 2010.