Publications

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Guo, Z. Yang, X. S. Liu, Z. Chuan Yang, Q. Cheng Zhao, L. Tao Lin, H. Xie, and G. Zhen Yan, "Electrostatic isolation structure for linearity improvement of a lateral-axis tuning fork gyroscope", 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Wanchai, Hong Kong, China, IEEE, pp. 264 - 267, 2010.