Publications
Found 3 results
Author Title Type [ Year
Filters: Author is Liu, Lin and Keyword is actuators [Clear All Filters]
"Confocal microendoscopic 3D imaging using MEMS scanners for both lateral and axial scans", Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, pp. 1085-1088, Jan, 2013.
, "An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 13-14, Aug, 2013.
, "Three-dimensional confocal scanning microscope using an MEMS mirror for lateral scan and an MEMS lens scanner for depth scan", Optical MEMS and Nanophotonics (OMN), 2012 International Conference on, pp. 158-159, Aug, 2012.
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