Publications
"Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.
, "An ultra-fast electrothermal micromirror with bimorph actuators made of copper/tungsten", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.
,