MEMS-based Optical Sensors for High Temperature Applications
The goal of this research is to develop a pressure sensor and shear stress sensor that are able to provide continuous, time-resolved flow measurements within high temperature environments such as those seen in hypersonic wind tunnels and turbines. A primary focus of this research is on the micromachining of sapphire using a picosecond laser. Sapphire’s mechanical and thermal properties make it an ideal material for high temperature measurements. Each sensor operates by mechanically deflecting under either a pressure or shear stress. These deflections can then be detected using an opto-mechanical transduction scheme. The completed sensors will be tested in flow cells and wind tunnels at UF as well as in other transonic and hypersonic facilities.
J-355PS Picosecond Laser Micromachining Workstation from Oxford Lasers