The recent article titled, "Resolving Mechanical Properties and Morphology Evolution of Free-Standing Ferroelectric Hf0.5Zr0.5O2" targets the accurate extraction of Young's modulus, built-in stress, and crystal morphology change upon release of hafnia-zirconia thin films. Hafnia-zirconia is uniquely positioned to revolutionize nanoscale transducers, allowing for nanomechanical sensors and actuators to be monolithically integrated within CMOS.
Research credit goes to IMG student Troy Tharpe and IMG post-doc Xu-Qian Zheng, under a collaborative effort led by Drs. Tabrizian and Feng!
Check out the article at https://onlinelibrary.wiley.com/doi/abs/10.1002/adem.202101221.