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Yang, B., L. Zhou, X. Zhang, S. Koppal, and H. Xie, "A compact MEMS-based wide-angle optical scanner", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.