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Roberts, J. C.
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2009
Chen, K.-H.
,
F. Ren
,
A. Pais
,
H. Xie
,
B. P. Gila
,
S. J. Pearton
,
J. W. Johnson
,
P. Rajagopal
,
J. C. Roberts
,
E. L. Piner
, et al.
,
"
Cu-plated through-wafer vias for AlGaN∕GaN high electron mobility transistors on Si
"
,
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
, vol. 27, issue 5, pp. 2166, 2009.