Publications

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Xie, H., and G. K. Fedder, "A DRIE CMOS-MEMS gyroscope", IEEE SENSORS 2002Proceedings of IEEE Sensors, vol. 2, Orlando, FL, USA, IEEE, pp. 1413 - 1418, 2002.
Xie, H., Z. Pan, W. Frey, and G. K. Fedder, "Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer", Proc. of the 2003 Nanotechnology Conference, San Francisco, CA, USA, 2003.