Publications

Xie, H., Z. Pan, W. Frey, and G. K. Fedder, "Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer", Proc. of the 2003 Nanotechnology Conference, San Francisco, CA, USA, 2003.

Wu, J., G. K. Fedder, and L.R. Carley, "A low-noise low-offset capacitive sensing amplifier for a 50-/spl mu/g//spl radic/Hz monolithic CMOS MEMS accelerometer", IEEE Journal of Solid-State Circuits, vol. 39, issue 5, pp. 722 - 730, 05/2004.

Qu, H., D. Fang, and H. Xie, "An Integrated Fully-Differential CMOS-MEMS Z-axis Accelerometer Utilizing a Torsional Suspension", IEEE NEMS 2008, Sanya, China, 01/2008.

Qu, H., D. Fang, and H. Xie, "A Monolithic CMOS-MEMS 3-Axis Accelerometer With a Low-Noise, Low-Power Dual-Chopper Amplifier", IEEE Sensors Journal, vol. 8, issue 9, pp. 1511 - 1518, 09/2008.