Publications
Found 3 results
Author Title Type [ Year
Filters: Keyword is microelectromechanical systems (MEMS) [Clear All Filters]
"A Lateral-Axis Microelectromechanical Tuning-Fork Gyroscope With Decoupled Comb Drive Operating at Atmospheric Pressure", Journal of Microelectromechanical Systems, vol. 19, issue 3, pp. 458 - 468, 06/2010.
, "An electrothermal microlens scanner with low-voltage large-vertical-displacement actuation", IEEE Photonics Technology Letters, vol. 17, issue 9, pp. 1971 - 1973, 09/2005.
, "Low-Power CMOS Wireless MEMS Motion Sensor for Physiological Activity Monitoring", IEEE Transactions on Circuits and Systems I: Regular Papers, vol. 52, issue 12, pp. 2539 - 2551, 12/2005.
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