Publications
Found 2 results
Author Title Type [ Year
Filters: Keyword is microelectromechanical systems [Clear All Filters]
"Pre-Shaped Open Loop Drive of Electrothermal Micromirror by Continuous and Pulse Width Modulated Waveforms", Quantum Electronics, IEEE Journal of, vol. 46, no. 9, pp. 1254 -1260, 09/2010.
, "Fabrication, Characterization, and Modeling of Fully-Batch-Fabricated Piston-Type Electrodynamic Microactuators", Journal of Microelectromechanical Systems, vol. 23, no. 1, pp. 220-229, 2013, 2014.
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