Publications

Found 4 results
Author Title Type [ Year(Asc)]
Filters: Author is Huikai Xie and Keyword is CMOS-MEMS  [Clear All Filters]
2008
Qu, H., D. Fang, and H. Xie, "An Integrated Fully-Differential CMOS-MEMS Z-axis Accelerometer Utilizing a Torsional Suspension", IEEE NEMS 2008, Sanya, China, 01/2008.
Qu, H., D. Fang, and H. Xie, "A Monolithic CMOS-MEMS 3-Axis Accelerometer With a Low-Noise, Low-Power Dual-Chopper Amplifier", IEEE Sensors Journal, vol. 8, issue 9, pp. 1511 - 1518, 09/2008.
2003
Xie, H., Z. Pan, W. Frey, and G. K. Fedder, "Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer", Proc. of the 2003 Nanotechnology Conference, San Francisco, CA, USA, 2003.
2002
Xie, H., and G. K. Fedder, "A DRIE CMOS-MEMS gyroscope", IEEE SENSORS 2002Proceedings of IEEE Sensors, vol. 2, Orlando, FL, USA, IEEE, pp. 1413 - 1418, 2002.