Publications
Found 2 results
Author Title Type [ Year
Filters: Author is Huikai Xie and Keyword is thermal actuator [Clear All Filters]
"Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs", Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on, pp. 817-820, April, 2013.
, "An Electrothermomechanical Lumped Element Model of an Electrothermal Bimorph Actuator", Journal of Microelectromechanical Systems, vol. 17, issue 1, pp. 213 - 225, 02/2008.
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