Publications

Found 1 results
Author Title Type [ Year(Desc)]
Filters: Author is Gary K. Fedder and First Letter Of Title is F  [Clear All Filters]
2003
Xie, H., and G. K. Fedder, "Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope", IEEE Sensors Journal, vol. 3, issue 5, pp. 622 - 631, 10/2003.