Publications

Qu, H., D. Fang, and H. Xie, "A Single-crystal Silicon 3-axis CMOS-MEMS Accelerometer", IEEE Sensors, 2004, Vienna, Austria, IEEE, pp. 661 - 664, 10/2004.

Qu, H., and H. Xie, "Process Development for CMOS-MEMS Sensors With Robust, Electrically Isolated Bulk Silicon Microstructures", Journal of Microelectromechanical Systems, vol. 16, issue 5, pp. 1152 - 1161, 10/2007.

Qu, H., D. Fang, and H. Xie, "An Integrated Fully-Differential CMOS-MEMS Z-axis Accelerometer Utilizing a Torsional Suspension", IEEE NEMS 2008, Sanya, China, 01/2008.

Qu, H., D. Fang, A. Sadat, J. Yuan, and H. Xie, "High-Resolution Integrated Micro Gyroscope for Space Applications", 41st Space Congress, Cape Canaveral, Florida, USA, 04/2004.

Qu, H., D. Fang, and H. Xie, "Fabrication and Characterization of an Integrated CMOS-MEMS Accelerometer", Nanotech 2007, Santa Clara, California, USA, 2007.

Qu, H., D. Fang, and H. Xie, "A Monolithic CMOS-MEMS 3-Axis Accelerometer With a Low-Noise, Low-Power Dual-Chopper Amplifier", IEEE Sensors Journal, vol. 8, issue 9, pp. 1511 - 1518, 09/2008.

Qu, H., D. Fang, and H. Xie, Microfabrication and Characterization of an Integrated 3-Axis CMOS-MEMS Accelerometer: IEEE, pp. 60 - 67, 2005.

Qu, H., D. Fang, and H. Xie, "A Monolithic CMOS-MEMS 3-Axis Accelerometer with A Low-Noise, Low-Power Dual Chopper Amplifier", Solid-state Sensors, Actuators and Microsystem Workshop, Hilton Head, SC, pp. 224-227, June, 2006.