Publications
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, "Single-wafer solution and optical phased array application of micro-mirror arrays with high fill factor and large sub-apertures", 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Wanchai, Hong Kong, China, IEEE, pp. 180 - 183, 2010.