| Title | Single-wafer solution and optical phased array application of micro-mirror arrays with high fill factor and large sub-apertures |
| Publication Type | Conference Paper |
| Year of Publication | 2010 |
| Authors | Jia, K., S. Samuelson, and H. Xie |
| Conference Name | 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) |
| Publisher | IEEE |
| Conference Location | Wanchai, Hong Kong, China |
| ISBN Number | 978-1-4244-5761-8 |
| DOI | 10.1109/MEMSYS.2010.5442537 |
