Single-wafer solution and optical phased array application of micro-mirror arrays with high fill factor and large sub-apertures

TitleSingle-wafer solution and optical phased array application of micro-mirror arrays with high fill factor and large sub-apertures
Publication TypeConference Paper
Year of Publication2010
AuthorsJia, K., S. Samuelson, and H. Xie
Conference Name2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherIEEE
Conference LocationWanchai, Hong Kong, China
ISBN Number978-1-4244-5761-8
DOI10.1109/MEMSYS.2010.5442537