Publications
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Author Title Type [ Year
Filters: Author is Chen, Qiao and Keyword is electrothermal actuator [Clear All Filters]
"A 45°-tilted 2-axis scanning micromirror integrated on a silicon optical bench for 3D endoscopic optical imaging", 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, Portugal, IEEE, pp. 948 - 951, 1/2015.
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