Publications

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Author Title Type [ Year(Asc)]
Filters: Author is Chen, Qiao and Keyword is bimorph structure  [Clear All Filters]
2013
Chen, Q., H. Zhang, X. Zhang, D. Xu, and H. Xie, "Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs", Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on, pp. 817-820, April, 2013.