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W. Wang
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Conference Paper
Wang, W.
,
J. Chen
,
Q. Tanguy
, and
H. Xie
,
"
A Monolithic Michelson interferometer with a large piston MEMS micromirror
"
,
2016 International Conference on Optical MEMS and Nanophotonics (OMN)
, Singapore, Singapore, IEEE, 2016.