Title | A Monolithic Michelson interferometer with a large piston MEMS micromirror |
Publication Type | Conference Paper |
Year of Publication | 2016 |
Authors | Wang, W., J. Chen, Q. Tanguy, and H. Xie |
Conference Name | 2016 International Conference on Optical MEMS and Nanophotonics (OMN) |
Publisher | IEEE |
Conference Location | Singapore, Singapore |
URL | http://ieeexplore.ieee.org/document/7565818/ |
DOI | 10.1109/OMN.2016.7565818 |