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Fang Chen
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2001
Chen, F.
,
H. Xie
, and
G. K. Fedder
,
"
A MEMS-Based Monolithic Electrostatic Microactuator for Ultra-Low Magnetic Disk Head Fly Height Control
"
,
IEEE Transaction on Magnetics
, vol. 37, no. 4, pp. 1915-1918, JUL, 2001.