| Title | Fabrication and characterization of advanced through glass via interconnects |
| Publication Type | Journal Article |
| Year of Publication | 2016 |
| Authors | Clingenpeel, T., A. Rahimi, S. Hwangbo, Y.-K. Yoon, and A. Shorey |
| Journal | International Symposium on Microelectronics |
| Volume | 2016 |
| Issue | 1 |
| Pagination | 000288 - 000292 |
| Date Published | Feb-10-2016 |
| ISSN | 2380-4505 |
| URL | http://imapsource.org/doi/10.4071/isom-2016-WP23 |
| DOI | 10.4071/isom-2016-WP23 |
| Short Title | International Symposium on Microelectronics |
