Hongzhi Sun will be proposing his dissertation topic, "Sensing and Control
Electronics Design for Capacitive CMOS-MEMS Inertial Sensors" at 10am on Tuesday, December 14th in NEB 589. All are invited and refreshments will be provided.
Chris Meyer will present "Micromachined Inductors and Transformers for Miniaturized Power Converters." All are welcome to attend.
Refreshments will be provided.
Speaker: Jessica Meloy
Introduction: The time-resolved characterization of complex wall-bounded flow fields is difficult and unachievable with the current set of research tools. At the University of Florida the Interdisciplinary Microsystems Group (IMG) has teamed with FCAAP to develop the next generation of instrumentation grade sensors for aerospace applications. Specifically, microelectromechanical systems (MEMS) technology is being used to develop sensor systems for reliable direct time-resolved shear stress measurement and fill this instrumentation void. IMG has developed a robust miniaturized package for integration into flow control studies currently being conducted at both the Advanced Aero-Propulsion Laboratory at Florida State University and at IMG wind tunnel facilities at the University of Florida. The specific sensor system being utilized in these studies is capable of measuring shear stress values as low as 1mPa with a sensitivity of 1.7mV/V/Pa and at least 80dB rejection to cross sensitivities. In this seminar the sensor system’s circuitry and package development will be discussed.
Speaker: Wenjing Liu
Introduction: This talk is about the design, fabrication and characterization of a piezoelectrically actuated high-fill-factor tip-tilt-piston (TTP) micromirror with nearly zero initial tilt and no lateral shift during scanning. The piezoelectric material is a sol-gel lead zirconate titanate (PZT) thin film with a Zr/Ti ratio of 53/47. The zero-initial-tilt (ZIT) and lateral-shift-free (LSF) of the mirror plate is achieved by a folded, three-segment piezoelectric unimorph actuator design. The piezoelectric unimorph actuation beams consist of Pt/Ti/PZT/Pt/Ti/SiO2 multilayers, which are released via undercutting the substrate silicon.
Refreshments will be served.
Speaker: Hongzhi Sun
Introduction: IMUs have wide automotive, consumer electronics, and medical applications. The focus of this talk is on a three-axis accelerometer and two single-axis gyroscopes. The presentation will include the CMOS-MEMS process, the interface circuit design, and the characterizations for the monolithic IMU.
Refreshments will be served.