Publications

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Filters: Keyword is thin-film surface micromachining  [Clear All Filters]
2009
Jia, K., S. Pal, and H. Xie, "An Electrothermal Tip-Tilt-Piston Micromirror Based on Folded Dual S-Shaped Bimorphs", Microelectromechanical Systems, Journal of, vol. 18, no. 5, pp. 1004 -1015, 2009.