Publications

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Filters: Author is Gary K. Fedder and Keyword is Gyroscope  [Clear All Filters]
2002
Xie, H., and G. K. Fedder, "A DRIE CMOS-MEMS gyroscope", IEEE SENSORS 2002Proceedings of IEEE Sensors, vol. 2, Orlando, FL, USA, IEEE, pp. 1413 - 1418, 2002.