Publications

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Filters: Author is Hongwei Qu and Keyword is undercut  [Clear All Filters]
2007
Qu, H., and H. Xie, "Process Development for CMOS-MEMS Sensors With Robust, Electrically Isolated Bulk Silicon Microstructures", Journal of Microelectromechanical Systems, vol. 16, issue 5, pp. 1152 - 1161, 10/2007.