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Zhu, Yiping
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Zhu, Y.
,
W. Liu
,
K. Jia
,
W. Liao
, and
H. Xie
,
"
A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift
"
,
Sensors and Actuators A: Physical
, vol. 167, issue 2, no. 6, pp. 495 - 501, 6/2011.