Title | A Tunable Microlens Scanner with Large-Vertical-Displacement Actuation |
Publication Type | Conference Paper |
Year of Publication | 2005 |
Authors | Jain, A., and H. Xie |
Conference Name | 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2005) |
Date Published | 01/2005 |
Publisher | IEEE |
Conference Location | Miami Beach, FL |
Other Numbers | pp. 92-95 |
DOI | 10.1109/MEMSYS.2005.1453875 |