A Tunable Microlens Scanner with Large-Vertical-Displacement Actuation

TitleA Tunable Microlens Scanner with Large-Vertical-Displacement Actuation
Publication TypeConference Paper
Year of Publication2005
AuthorsJain, A., and H. Xie
Conference Name18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2005)
Date Published01/2005
PublisherIEEE
Conference LocationMiami Beach, FL
Other Numberspp. 92-95
DOI10.1109/MEMSYS.2005.1453875