| Title | Silicon Molding Techniques for Integrated Power MEMS Inductors |
| Publication Type | Journal Article |
| Year of Publication | 2010 |
| Authors | Wang, M., J. Li, K. Ngo, and H. Xie |
| Journal | Sensors & Actuators: A. Physical |
| Keywords | integrated inductor, MEMS, power converter, silicon substrate molding |
| DOI | 10.1016/j.sna.2010.12.012 |
