MEMS mirrors based on a curved concentric electrothermal actuator

TitleMEMS mirrors based on a curved concentric electrothermal actuator
Publication TypeJournal Article
Year of Publication2012
AuthorsLiu, L., S. Pal, and H. Xie
JournalSensors and Actuators A: Physical
Date Published3/2012
ISSN09244247
DOI10.1016/j.sna.2012.03.021
Short TitleSensors and Actuators A: Physical