Title | MEMS mirrors based on a curved concentric electrothermal actuator |
Publication Type | Journal Article |
Year of Publication | 2012 |
Authors | Liu, L., S. Pal, and H. Xie |
Journal | Sensors and Actuators A: Physical |
Date Published | 3/2012 |
ISSN | 09244247 |
DOI | 10.1016/j.sna.2012.03.021 |
Short Title | Sensors and Actuators A: Physical |