| Title | Thermoelastically Actuated Acoustic Proximity Sensor with Integrated Through-Silicon Vias |
| Publication Type | Journal Article |
| Year of Publication | 2012 |
| Authors | Griffin, B. A., V. Chandrasekaran, and M. Sheplak |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 21 |
| Start Page | 350 |
| Date Published | 04/2012 |
| Type of Article | Journal |
| URL | http://dx.doi.org/10.1109/JMEMS.2011.2178114 |
| DOI | 10.1109/JMEMS.2011.2178114 |
| Refereed Designation | Refereed |
