Title | MEMS mirrors based on a curved concentric electrothermal actuator |
Publication Type | Journal Article |
Year of Publication | 2012 |
Authors | Liu, L., S. Pal, and H. Xie |
Journal | Sensors and Actuators A: Physical (In Press) |
DOI | 10.1016/j.sna.2012.03.021 |
Refereed Designation | Refereed |